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Stress and Microstructural Evolution in Metal Oxide Thin Films

Stress and functionality

Jezik AngleščinaAngleščina
Knjiga Mehka
Knjiga Stress and Microstructural Evolution in Metal Oxide Thin Films K. V. L. V. Narayanachari
Koda Libristo: 13648203
Založba LAP Lambert Academic Publishing, julij 2016
System on Chip (SoC) and System in Package (SiP) are two electronic technologies that involve integr... Celoten opis
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System on Chip (SoC) and System in Package (SiP) are two electronic technologies that involve integrating multiple functionalities onto a single platform. When the platform is a single wafer, as in SOC, it requires the ability to deposit various materials that enable the different functions on to an underlying substrate that can host the electronic circuitry. Transition metal oxides which have a wide range of properties are ideal candidates for the functional material. These oxides need to be deposited on Si in certain crystallographic orientations. Thus, during growth of the functional oxide, an ambience in which the Si itself will not oxidize needs to be provided. In addition, during thin film growth on either Si or SiOx surface stresses are generated from various sources. Stress and its relaxation are also associated with the formation and evolution of defects. Both, stress and defects need to be managed in order to harness their beneficial effects and prevent detrimental ones.

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O knjigi

Polni naslov Stress and Microstructural Evolution in Metal Oxide Thin Films
Jezik Angleščina
Vezava Knjiga - Mehka
Datum izida 2016
Število strani 164
EAN 9783659905162
ISBN 365990516X
Koda Libristo 13648203
Teža 261
Mere 150 x 220 x 10
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