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Silicon Semiconductor Technology

Processing and Integration of Microelectronic Devices

Jezik AngleščinaAngleščina
Knjiga Mehka
Knjiga Silicon Semiconductor Technology Ulrich Hilleringmann
Koda Libristo: 43050800
Založba Springer, Berlin, avgust 2023
The book presents the basic steps and the technical implementation of individual processes for micro... Celoten opis
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61.90 €
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The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.

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O knjigi

Polni naslov Silicon Semiconductor Technology
Avtor Ulrich Hilleringmann
Jezik Angleščina
Vezava Knjiga - Mehka
Datum izida 2023
Število strani 276
EAN 9783658410407
Koda Libristo 43050800
Založba Springer, Berlin
Teža 524
Mere 168 x 240

Kategorije

Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering
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