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Optical Physics for Nanolithography

Name: Optical Physics for Nanolithography
Brand: SPIE Press
SKU: 19389296
Availability: OutOfStock
Author: Anthony Yen
ISBN: 9781510617377

Anthony Yen

Shinn-Sheng Yu

Jezik

Angleščina

Knjiga Mehka

Založba SPIE Press, maj 2018

Provides an in-depth, self-contained introduction of partially coherent imaging theory for researche... Celoten opis

Koda Libristo: 19389296

Provides an in-depth, self-contained introduction of partially coherent imaging theory for researchers and engineers working on optical lithography for semiconductor manufacturing, including those in the EDA industry. It is mathematically complete: the opening chapters discuss the essential principles, and all derivations are presented with their intermediate steps.