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Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems

Name: Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems
Brand: Springer, Berlin
SKU: 49856307
Price: 85.09 EUR
Availability: InStock
Author: Jingmin Li
ISBN: 9789819547579

Jingmin Li

Chong Liu

Liding Wang

Jezik

Angleščina

Knjiga Trda

Koda Libristo: 49856307

Založba Springer, Berlin, april 2026

This book is a well-structured textbook that systematically introduces the basic concepts, process t... Celoten opis

Koda Libristo: 49856307

207 b

85.09 €

Na zalogi pri dobavitelju Odposlali bomo v 10-13 dneh

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Vingt Leçons de philosophie par le meurtre DELCLOS

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Białystok. Od dynamicznego rozwoju ludności do zapaści demograficznej (1946-2022) Witold Rakowski

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This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided into eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, microfabrication technology of non-silicon materials, MEMS microsensors, MEMS microactuators, recent developments in biomedical, telecommunication, and aerospace fields. This book combines process principles and application examples with rigorous logic. It is suitable for basic learning and knowledge expansion for readers majoring in mechanical engineering, instrument science and technology, electronic science and technology, and physics.