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Experimental Characterization Techniques for Micro/Nanoscale Devices

Name: Experimental Characterization Techniques for Micro/Nanoscale Devices
Brand: Springer Verlag GmbH
SKU: 11409206
Price: 136.57 EUR
Availability: InStock
Author: Kimberly L. Turner
ISBN: 9780387308623

Kimberly L. Turner

Peter G. Hartwell

Jezik

Angleščina

Knjiga Trda

Koda Libristo: 11409206

Založba Springer Verlag GmbH, februar 2007

Characterization Techniques for Micro/Nanoscale Devices introduces commonly utilized and import... Celoten opis

Koda Libristo: 11409206

331 b

136.57 €

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Characterization Techniques for Micro/Nanoscale Devices introduces commonly utilized and important techniques for the dynamic measurement and characterization of MEMS and NEMS devices. It outlines many of the techniques currently available for the test and characterization of MEMS and gives guidance in choosing an adequate technique for monitoring certain signals. After reading this book, MEMs Designers and researchers will be able to determine the best test technique for his/her application, put together a viable experimental setup, complete the measurements, and do appropriate error and/or fatigue analysis on the collected data. TOC:Motivation and History of Test through Examples.- Motivation.- Applications utilizing dynamic MEMS/NEMS.- Device Test/Characterization/Modeling Techniques.- Optical methods for dynamic characterization.- Static and Quasi-static measurements for characterizing MEMS/NEMS.- Actuation Methods.- Parameterization/Modeling.- Characterizing an in-plane MEMS actuator.- Material characterization.- Material Characterization.- Failure of MEMS and Reliability testing.- Specialized Testing and Design of Test experiments.- Specialized test apparatus.- Design for Test.- Appendix.- Quick Tips for MEMS/NEMS testing and design.- Capactitive measurements for MEMS.- Index.

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O knjigi

Polni naslov Experimental Characterization Techniques for Micro/Nanoscale Devices

Avtor Kimberly L. Turner, Peter G. Hartwell

Jezik

Angleščina

Vezava Knjiga - Trda

Datum izida 2007

Število strani 500

EAN 9780387308623

ISBN 0387308628

Koda Libristo 11409206

Založba Springer Verlag GmbH

Kategorije

Technology, Engineering, Agriculture > Technology: general issues > Nanotechnology

Technology, Engineering, Agriculture > Mechanical engineering & materials > Mechanical engineering

Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science

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