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Izdaje 31. 12. 2026
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This book will provide an introduction to the epitaxy of the group-IV semiconductor materials. It will primarily be of interest to undergraduate and graduate students who are looking for an introduction to the topic. However, it will also be useful to those who are either involved in research or development of group-IV semiconductor materials and devices. It will cover topics that include the fundamental physics and basic properties of the materials; devices for building material elements; substrates for epitaxy; epitaxy fundamentals; strained and relaxed heteroepitaxy; virtual substrates; selective epitaxy; epitaxial growth techniques; epilayers characterisation techniques; and a brief overview of the current state of the art in epitaxy of various group IV semiconductor materials including silicon, silicon germanium, silicon carbide, diamond and others.
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