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Silicon Semiconductor Technology

Name: Silicon Semiconductor Technology
Brand: Springer Vieweg
SKU: 45006074
Price: 66.66 EUR
Availability: InStock
Author: Ulrich Hilleringmann
ISBN: 9783658410414

Processing and Integration of Microelectronic Devices

Ulrich Hilleringmann

Jezik

Angleščina

E-knjiga Adobe ePub DRM

Založba Springer Vieweg, avgust 2023

The book presents the basic steps and the technical implementation of individual processes for micro... Celoten opis

Koda Libristo: 45006074

162 b

66.66 €

Na zalogi Prenesi zdaj

The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.